Products and Solutions Offered
Vacuum Gauges: full line of passive and active vacuum gauges to measure from ATM pressure down to 10E-11 Torr, FieldBus available: DeviceNet, Profibus, EtherCat; High Precision Vacuum Gauges for exact process monitoring or for calibration lab purposes.
Thin Film Deposition Controllers and Monitors including single, dual, 6 Crystal, and 12 Crystal sensors and full line of various 6MHz/5MHz crystals.
Residual Gas Analysis Equipment for HV/UHV application, high pressure and ATM sampling applications, and Integrated Process Control Gas Analysis systems integrated into the Semiconductor tool, Vacuum Furnace (EB, VIM, VAR, PAM), Metallizer Operating System.
Leak Detection: Both Vacuum (Inboard) and Sniffer (Outboard) leak detectors using tracer gas of He, H2, or other. Portable and Explosion Proof Leak Detectors are available.
Products and Solutions Offered
Tetrode type and Solid State Electron Beam Power Supplies: from 3kW up to 30kW
Single and Multi Crucible Electron Beam Sources, plus all UHV Vacuum and Power Feedthroughs
Source and Substrate Shutters
Digital Sweep Controllers
Crucible Index Controllers
Precision In-situ Optical monitors for both Transmission and Reflection
Ion Beam Sources
FerroFluidic Rotary Feedthroughs: Solid and Hollow Shaft designs
Cyrogenically Cooled Meissner Water Vapor CryoTraps